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Is that possible for the whole unit to process with different gases such as Ar, O2, H2 and so forth,  the following content is from the manual for the vacuum pump.

     等离子清洗机可以处理不同的气体如氩气、氧气、氘气等气体吗?Harrick小型等离子清洗机完全可以，下面是真空泵与处理气体的信息：

Inlet Gasses

惰性气体：
The pump was designed to operate with clean air or inert gasses at inlet temperatures from 0-100oF.

真空泵是设计用来与洁净空气或惰性气体在0-100℉（约-17.78-37.78℃）温度范围内工作的。
Danger! The pump must not be used for corrosive gasses or vapors and not for pumping oxygen. Explosion hazard!

注意：真空不能用于抽腐蚀性气体或蒸汽；也不能用于抽氧气。有爆炸的危险！

A: Other gases can be used with the plasma cleaner. We just have to check that the materials used in our plasma unit are compatible with the process gas in mind.  If the materials in the plasma unit are not compatible with the process gas, we would have to make the appropriate materials substitution. On the vacuum pumps, I do not know which vacuum pump you have, but the standard vacuum pumps (PDC-VPE-2 and PDC-VP-2) are compatible with nonreactive and inert gases, such as air, nitrogen (N2), and argon (Ar). The standard vacuum pumps are *not* compatible with oxygen gas because the combination of concentrated oxygen with hydrocarbon pump oil creates an explosion hazard.  For pumping oxygen, we distribute 2 types of oxygen service pumps (PDC-OPF and PDC-OPD) that are suitable for pumping oxygen. For other gases, please consult with us to make sure of the compatibility and to determine if additional pump accessories are required to pump a specific process gas.

其它气体能作为处理气体与等离子清洗机共用。但我们需要确认等离子清洗机内部使用的材料是否与处理气体相适应。如果等离子机内部使用的材料与处理气体不相容（not compatible），我们需要更换适当的材料。标准真空泵(型号：PDC-VPE-2 、 PDC-VP-2)与不反应及惰性气体相适应（compatible）如大气、氮气和氩气。标准真空泵不与氧气相容（not compatible），因为浓缩氧气(concentrated oxygen) 与碳氢化泵油(hydrocarbon pump oil)的混合物会导致爆炸的危险。关于氧气处理，我们有两款泵 (PDC-OPF 及 PDC-OPD) 适合抽氧气。关于其它气体，请联系我们确定适用性，看是否有需要配备其它真空泵附件（additional pump accessories），用来抽特定的处理气体。

本博客版权归 迈可诺等离子技术小组 所有，未经同意不得转载。